Object of Research

Semiconductor, Photovoltaic, Crystal Oscillator, Glass for LCD •PDP

Objects

Dispersion agent

Water series coolant, Mineral series coolant

Compact body measures 98 (W) x 202 (D) x 15 (H) mm. Input of many software makes it possible to analyze lots of components. Use of a pre processing machine makes it possible to analyze phosphorus and nitrogen and COD.

Characteristics

• Possible to measure residual chlorine (HS-1000CL)
• Possible to measure COD (HS-1000COD)
• Possible to measure CNP (HS-1000CNP)
• Possible to make itemized measurement of subterranean water (HS-1000GW)

Characteristics

• Full IPA delivery to system
• Stable drying condition
• 99% recovery
• Stable purity
• Full automatic operation
• Full safety system
• Save labor cost
• Compact to small space

Specifications

• Refining ability: up to 15 Litres/Hr.

This is a unit to let microbubble dissolve into DI water and supply the microbubble water to the use point automatically and safely for better cleaning results.

Characteristics

• Compact body of space-saving design
• The unit consists of 1~4 or 8 chambers or tanks.
• Microbubble water flow is 1~14LPM. (To be discussed separately.)
• The unit is automatically controlled following the signals.
• Economy mode to save DI water while standing by (optional).
• A leakage sensor is included in the standard specs.
• The unit is usable for a batch cleaning machine. (circulation type)
• The unit is usable for a single wafer cleaning machine (one pass type)
• Possible to meet requirement of each cleaning machine manufacturer.
• Diameter of a bubble is about *0μm.
• A separate discussion will be held about dissolution of metal. (E-10)
• DI water flow is about 14LPM max.

This is a newly developed waste water treatment system to discharge cohered oil by adding and mixing the special cohesive agent (oil flock) in the oil containing waste water pooled in a tank.

Characteristics

• Customize our system according to each customer’s budget.
• Just add the cohesive agent (oil flock) and press the button to start operation.
• Both batch operation and continuous operation are available. The treatment capacity is from 100L/day to 10m/day.
• The cost of cohesive agent is low and only a small amount is needed for operation. Running cost, therefore, is sizably low.
• A timer is programmed for less workers and faster operation.
• Filter bags can be replaced easily and safely at low cost.